Axcelis Electron Shower Filament (5-leg)


5-Leg Electron Shower Filament for various Axcelis and Eaton Ion Implant tools.



Our 5-leg Axcelis Electron Shower Filament fits both Axcelis and Eaton applications. Mass ordering is available. Click the following link for our 7-leg Electron Shower Filaments.

Benefits of our Axcelis Electron Shower Filament:

  • Made in America
  • High Quality
  • Less Expensive than OEM
  • Also Fits Eaton Applications

Please refer to the following part numbers when relaying information for orders or placing an order.

Eaton Part # 1900400

Axcelis Part # 1900400

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